Access to this dataset is subject to the following terms:
If you use this dataset please add this citation to your publication:
O'Brien, Thomas Robert Jr.; Chow, Edmond; Nahrstedt, Klara; Lewis, Bruce; Dallesasse, John Michael, "Silicon and Dielectric Dry-Etch Recipes," 2017, http://dx.doi.org/doi:10.18126/M2C88F
Title: Silicon and Dielectric Dry-Etch Recipes
Authors: O'Brien, Thomas Robert Jr.
Chow, Edmond
Nahrstedt, Klara
Lewis, Bruce
Dallesasse, John Michael
Keywords: Scanning Electron Microscopy (SEM)
silicon etch
dielectric etch
dry-etching
plasma-etching
Si(111)
Issue Date: 9-Feb-2017
Publisher: Materials Data Facility
URI: http://dx.doi.org/doi:10.18126/M2C88F
Appears in Collections:MDF Open



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